The MEMS mass flow sensors are made with the company's proprietary MEMS mass flow sensing technology featuring large dynamic range, high accuracy and long life time. The MEMS sensing elements are designed with a pressure balancer that allows the applications at high working pressures.
The newly developed thermal-D and thermal time-of-flight sensing offers the unprecedented performances and enabled with multi-parameter sensing capability.
Typical applications include,
1. Medical devices or equipment, such as ventilator, anesthesia equipment, asthma detector, autospirometers, endoscope, gamma knife, CPAP, and many more
2. Process control and monitor, such as wielding process, gas mixers, food package robot control clogging sensing fan monitoring and many more
3. Instrumentation, such as GC spectrometers, gas control equipment, air samplers, leak detection, gas analyzer, and many more
4. Semiconductor equipment, such as die-attachment, wire bonder, wet chemical bench monitor
5. Smart home/HVAC, provides the monitoring of the ventilation in hoods and feedback for efficiency.
The MEMS mass flow meters are built on the flow sensors with advanced user interfaces, wireless data ready for IoT, sophisticated package and can also apply for a large flow channel metrology requirements. The company's technology also enables the meter to automatically recognize the pre-programmed flow media which is not available for other similar products on market. Typical applications include,
1. Medical oxygen metering and control, provides in particular for hospital oxygen delivery system
2. Process control, such as beverage production, manufacture gas process, and others
3. Natural gas or other fuel gas, such as control of the combustion efficiency
4. Coal bed gas initiator, provides the tracer for the initiation of the drilled coal bed to facilitate the efficiency of the production
5. Smart cylinder gas meters, are specially developed for facilitating the gas cylinder consumption, leakage, dispatch, inventory and manufacture. The incorporated IOT technology enables the system to be truly smart.
The MEMS mass flow controllers are newly added to the product family. The products will be developed into several sub-classes and be released subsequently in the years 2023-24. In addition to the conventional mass flow control, the products shall offer additional control parameters including pressure control, vacuum control and gas property monitoring.
